Characterisation: Surface Profiler @C3 (KLA Tencor P16)

 What is it? 
   A contact stylus tool for surface profiling of substrate.
 
  Manufacturer:  KLA Tencor
 
  Model Name:  P16
 
  Applications:  Step Height Measurement. Surface Roughness
  
  Instrument Overview:  The KLA-Tencor P-16 Profiler is a highly sensitive surface profiler that measures step height, surface roughness, waviness and film stress curvature on sample surfaces. System uses stylus-based scanning which remains in constant contact with the sample surface by means of a user-specified force to achieve high resolution.
  Technical features and specifications: 
   Scan range: up to 200 mm
Vertical range: up to 110 um
Step height repeatability of 6Å or 0.1% (1σ)

Charges:
   User operated: NA/hour, Staff operated: NA/hour
 
  Instrument Manufacturer URL: https://www.kla-tencor.com/
 
  Detailed Specifications: 
   https://www.kla-tencor.com/products/instruments/stylus-profilers