2 Fusionopolis Way, Innovis, #08-03 Singapore 138634
What is it?
wafer wash and drying tool
Manufacturer: SEMITOOL
Model Name: 270S
Applications: wafer cleaning
Instrument Overview: The system have water spray, spin and gas purge function to clean wafers in cassette.
Technical features and specifications:
The system can load 25 piece 4inch or 6 inch wafer.
Charges:
NA
Instrument Manufacturer URL: NA
Detailed Specifications:
NA
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