A*STAR Scientific Equipment Finder

Cleaning: Spin Rinse Dryer (M:SEMITOOL 270S) @C5

equipment

2 Fusionopolis Way, Innovis, #08-03 Singapore 138634

What is it?
wafer wash and drying tool

Manufacturer: SEMITOOL

Model Name: 270S

Applications: wafer cleaning

Instrument Overview: The system have water spray, spin and gas purge function to clean wafers in cassette.

Technical features and specifications:
The system can load 25 piece 4inch or 6 inch wafer.

Charges:
NA

Instrument Manufacturer URL: NA

Detailed Specifications:
NA

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