A*STAR Scientific Equipment Finder

Ellipsometry: VASE (JA Woolam VB400)

equipment

2 Fusionopolis Way, Innovis, #08-03 Singapore 138634

What is it?
The variable angle spectroscopic ellipsometer (VASE) is used to determine thickness and optical constants of thin films.

Manufacturer: J.A. Woollam

Model Name: VB-400

Applications: Determine film thickness and optical constants; characterize composition, crystallinity, roughness, doping concentration, and other material properties associated with a change in optical response.

Instrument Overview: The VASE is an accurate and versatile ellipsometer, with variable wavelength and angle of incidence, to characterize a wide variety of materials, such as semiconductors, dielectrics, polymers, metals, and multi-layers.

Technical features and specifications:
Spectral Range: 240-2500 nm
Angle of incidence: 15° to 90°
Software: WVASE32

Charges:
NA

Instrument Manufacturer URL: https://www.jawoollam.com/

Detailed Specifications:

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