**A*STAR Scientific Equipment Finder**

Etch: 08-REL-VHF1

equipment

Institute of Microelectronics (IME)

What is it?
Xeric Oxide - Vapor Hydrogen Fluoride (VHF) System

Manufacturer: Memsstar LTD

Model Name:

Applications: RF MEMS

Instrument Overview: Single-wafer dry etching system for etching using gas chemistry in a non-plasma environment
With situNDIR sensor allows for robust process monitoring and endpoint detection

Technical features and specifications:
Able to process 200mm wafers and able to process non-standard die level coupon attached on 200mm wafer
3 lines (H2, HF, N2)); Constant Temperature Chiller ; Endpoint capability

Charges:
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Instrument Manufacturer URL: NA

Detailed Specifications:

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Etch: 08-REL-VHF1

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