**A*STAR Scientific Equipment Finder**

Etch: BR-DRE-Descum

equipment

Institute of Microelectronics (IME)

What is it?
BR-DRE-Descum

Manufacturer: Trymax

Model Name: NEO400

Applications: - Low temperature PR/descum strip - Plasma cleaning post debonding - Surface treatment

Instrument Overview: Single chamber with CCP (Capacitive Coupled Plasma) technology

Technical features and specifications:
* Compatible with metal frame carriers and with 300mm diced wafer substrates. * Integrated gasbox up to 5 digital mass flow controllers

Charges:
NA

Instrument Manufacturer URL: NA

Detailed Specifications:
NA

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Etch: BR-DRE-Descum

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