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Lithography: 08-PHL-Track1

equipment

Institute of Microelectronics (IME)

What is it?
Photolithography Track System

Manufacturer: Tokyo Electron, TEL

Model Name: ACT 8

Applications: Photolithography Track System

Instrument Overview: 200mm wafer conforming to SEMI standards

Technical features and specifications:
Wafer edge width exposure up till 5mm
Handling wafer warpage up to 180um
Substrate: Si, SiC, SOI, Sapphire, Quartz, Glass

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Instrument Manufacturer URL: NA

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Lithography: 08-PHL-Track1

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