**A*STAR Scientific Equipment Finder**

Lithography: BR-PHL-TSV-Stepper(N+1)

equipment

Institute of Microelectronics (IME)

What is it?
AP200/300StepperforAdvanced Packaging, RF and MEMS

Manufacturer: Veeco

Model Name: Altair

Applications: AdjustableNumerical Aperture projection opticsformaximumDoF in thick and thin resists with 0.8 to 2.0 µm minimum resolution

Instrument Overview: World-class HVM proven platform with full automation, selectable exposure wavelength and universal wafer size capability (6 & 8-in or 8 & 12-in wafers)

Technical features and specifications:
Broadband Projection Lens (350 – 450nm)
Warped Wafer Handling (± 4mm)
Full Wafer Mapping (Optical Focus)
Sub 1µm Line/Space Resolution

Charges:
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Instrument Manufacturer URL: NA

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**A*STAR Scientific Equipment Finder**

Lithography: BR-PHL-TSV-Stepper(N+1)

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