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Materials, Device & Reliability Analysis: FIB-SEM (Crossbeam)

equipment

Institute of Microelectronics (IME)

What is it?
FIB-SEM (Crossbeam)

Manufacturer: Zeiss

Model Name: XB550

Applications: FIB/SEM/TEM sample preparation & SEM imaging with laser milling appliation

Instrument Overview: FIB-3nm at 30kV; SEM-0.9 nm @ 15kV (WD 5 mm)

Technical features and specifications:
Range of deposition and etch chemistries.

Charges:
NA

Instrument Manufacturer URL: NA

Detailed Specifications:
NA

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