Metrology: Laser Flatness Measurement System

What is it?
A horizontal laser interferometer for high precision surface flatness measurements.

Manufacturer: Zygo

Model Name: Verifire HD

Applications: To provide measurement capability in surface flatness to support manufacturing industries in Optics, Machine Tools, Aerospace, Precision Engineering, Electronics etc

Instrument Overview: The system is able to generate high quality interference signal and equipped with 3 flats testing and full area calibration modules to achieve self- referencing capability.

Technical features and specifications:
Measuring range: 150 mm in dia RMS repeatability: <0.06 nm, l/10,000 (2 sigma) RMS Wavefront repeatability: <0.35 nm, l/1,800 (mean + 2 sigma) Peak Pixel Deviation: < 0.5 nm, l/1,200 (99.5th %) Measurement uncertainty: 0.02 µm

Charges:
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Instrument Manufacturer URL: https://www.zygo.com/

Detailed Specifications:
https://www.zygo.com/products/metrology-systems/laser-interferometers/verifire-hd-hdx