**A*STAR Scientific Equipment Finder**

Probe Station: Probe Station

equipment

Institute of Microelectronics (IME)

What is it?
Probe Station

Manufacturer: FormFactor

Model Name: Summit200

Applications: Used for measurement of photonic devices

Instrument Overview: Perform fiber to wafer optical alignment
Probing to supply and read electrical signals at DC and RF frequencies

Technical features and specifications:
Support up till 8inch wafer, Hexapods and Nanocube for fiber align on East and West
RF positioner on South (110 GHz infinity probes)
DC positioner on North
Temperature control from -40 to 125 °C

Charges:
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Instrument Manufacturer URL: NA

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**A*STAR Scientific Equipment Finder**

Probe Station: Probe Station

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