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PVD: 08-PVD-EnduraHP

equipment

Institute of Microelectronics (IME)

What is it?
08-PVD-EnduraHP

Manufacturer: AMAT

Model Name: Endura

Applications: •Both AlN and ScAlN are piezoelectric materials while Mo serves as electrodes on ScAlN •RF filters, Surface Acoustic Wave (SAW) filters •Piezoelectric Micromachined Ultrasonic Transducers, PMUT •Energy harvesters •Pressure sensors

Instrument Overview: Three separate and dedicated deposition chambers for AlN, ScAlN and Mo.

Technical features and specifications:
* Typical film thickness uniformity of less than 2% std dev * Typical film thickness from 10 nm to 1 µm

Charges:
NA

Instrument Manufacturer URL: NA

Detailed Specifications:
NA

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PVD: 08-PVD-EnduraHP

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