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Thermal processing: Rapid Thermal Processing (JETFIRST)

equipment

Institute of Materials Research and Engineering (IMRE)

2 Fusionopolis Way, Innovis, #08-03 Singapore 138634

 What is it? 
   A tool for fast thermal annealing.
 
  Manufacturer:  Jipelec
 
  Model Name:  JetFirst Series
 
  Applications:  Thermal processing
  
  Instrument Overview:  Wafer annealing machine
  
  Technical features and specifications: 
   WAFER SIZE small coupon to 8 inch size
  Charges:
   User operated: NA/hour, Staff operated: NA/hour
 
  Instrument Manufacturer URL: https://www.ecm-usa.com/
 
  Detailed Specifications: 
   https://www.ecm-usa.com/semiconductors/rtp-rta

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Thermal processing: Rapid Thermal Processing (JETFIRST)

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