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Thin film deposition: PECVD System (AMAT Producer ProducerIII)

equipment

Institute of Materials Research and Engineering (IMRE)

2 Fusionopolis Way, Innovis, #08-03 Singapore 138634

 What is it? 
   A tool for thin film deposition of SiO2 and SiNx.
 
  Manufacturer:  Applied Materials
 
  Model Name:  Producer III
 
  Applications:  Thin Film deposition - SIO2, SINX, HARDMASK
  
  Instrument Overview:  Chemical vapor deposition tool
  
  Technical features and specifications: 
   WAFER SIZE 8 inch
  Charges:
   User operated: NA/hour, Staff operated: NA/hour
 
  Instrument Manufacturer URL: https://www.appliedmaterials.com/
 
  Detailed Specifications: 
   https://www.appliedmaterials.com/semiconductor/products/producer/info

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**A*STAR Scientific Equipment Finder**

Thin film deposition: PECVD System (AMAT Producer ProducerIII)

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