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Thin film deposition: PVD System (AMAT Endura SiP CuBs)

equipment

Institute of Materials Research and Engineering (IMRE)

2 Fusionopolis Way, Innovis, #08-03 Singapore 138634

 What is it? 
   A tool equipped with multi-chambers for different PVD processes.
 
  Manufacturer:  Applied Materials
 
  Model Name:  Endura SiP CuBs
 
  Applications: Physical Vapor Deposition (PVD) - AL, TA, TAN, TI, TIN AND CU FILM WITH PRE-ETCH N DEGAS
  
  Instrument Overview: Metal sputtering machine
  
  Technical features and specifications: 
   WAFER SIZE 8 inch
  Charges:
   User operated: NA/hour, Staff operated: NA/hour
 
  Instrument Manufacturer URL:https://www.appliedmaterials.com/
 
  Detailed Specifications: 
   https://www.appliedmaterials.com/en-il/products/endura-cubs-rfx-pvd

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Thin film deposition: PVD System (AMAT Endura SiP CuBs)

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