X-Ray Spectroscopy: High Resolution X-Ray Diffractometer (HRXRD)

What is it?
This is a high-resolution x-ray diffraction (HRXRD) system for single crystalline thin films and semiconductors. The equipment is commonly used for wafer level HRXRD spectral acquisition of Epitaxial layers of compound semiconductors and thin films.

Manufacturer: Panalytical

Model Name: Xpert3 MRD (XL)

Applications: (1) HRXRD study of compound and elemental epitaxial layers of semiconductors such as GaN, GaAs, InP, SiGe, Si, Ge. (2) Thickness estimation of thin layers using x-ray reflectivity.

Instrument Overview: The Instrument has HRXRD modes with rocking curves, fast RSM mapping and x-ray reflectivity capability.

Technical features and specifications:
(1) The HRXRD tool has mapping stage for edge to edge point reciprocal space mapping (RSM) upto 200 mm diameter semiconductor wafer. (2) X-ray reflectivity capability upto 200 mm diameter wafers.

Charges:
N.A.

Instrument Manufacturer URL: https://www.malvernpanalytical.com/en

Detailed Specifications:
https://www.malvernpanalytical.com/en/products/product-range/xpert3-range/xpert3-mrd-xl