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Spectrometry: TOF-SIMS (IONTOF TOF.SIMS 5)

equipment

Institute of Materials Research and Engineering (IMRE)

2 Fusionopolis Way, Innovis, #08-03 Singapore 138634

What is it?
A surface spectrometry with high sensitivity in the ppm/ppb range, able to perform 2D imaging and depth profiling analysis. Particles are accelerated into a "flight tube" and their mass is determined by measuring the exact time at which they reach the detector (i.e. time-of-flight).

Manufacturer: IONTOF

Model Name: TOF.SIMS 5

Applications: Elemental/Molecular Surveys, Elemental/Molecular Maps and Depth Profiles

Instrument Overview:

Technical features and specifications:
Lateral resolution: <60 nm
Depth resolution: better than 1 nm

Charges:
NA

Instrument Manufacturer URL: NA

Detailed Specifications:

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**A*STAR Scientific Equipment Finder**

Spectrometry: TOF-SIMS (IONTOF TOF.SIMS 5)

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